KEMSTREAM

Informations générales

Kemstream creates high-performance vaporizers and atomizers. Vaporizers are direct liquid injection (DLI) vaporizers direct liquid injection vaporization systems and evaporators designed for reliable accurate and repeatable vaporization of liquid and dissolved solid compounds and precursors. These vapor delivery systems deliver pure vapor for every application including CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes and chambers. Atomizers are designed to deliver aerosol flow to spray pyrolysis and spray CVD processes. Direct liquid injection vaporizers belong to Vapbox series. Atomizers belong to Atokit series. Vapbox and Atokit systems feature the same unique innovative and patented atomization technology (injection head). A specific high-performances and fast response Injection Control Unit (ICU) has been developed to address the liquid and mixture injectors of the injection head that operate in pulsed regime. The mechanical design of the injection head makes its maintenance very easy. Kemstream also develops and manufacture accessories for direct liquid injection vaporization systems and atomizers and vapor cabinets. The accessories are carrier gas panels liquid panels liquid flow controlling kits liquid and gas cabinets and Temperature Control Units (TCU). Vapor cabinets are Vapcab systems. They feature one or more direct liquid injection vaporizer Vapbox the associated liquid and gas panels the necessary temperature controllers and a PLC (programmable Logic Controller). All those components are enclosed in a cabinet. If the PLC of the Vapcab is controlled from a PC Cabsoft control software is provided. The PLC can also be connected on a host computer or another PLC (master PLC)